Ultra-High Purity Diaphragm Valve Delivers Extended Life In Slurry Applications

Tucson, AZ - The flow control of slurry and aggressive fluids in semiconductor and clean-area applications is simplified by a fluoropolymer diaphragm valve from the Partek operation of Parker Hannifin. Called the 20 Series, the valve features a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media. As a result, the 20 Series valve offers a life of more than a million cycles in slurry applications - a greater than 50% improvement over Partek's standard DI water/chemical valve technology.

Compliant with the SEMI-F57-0301 standard for polymer components, Partek's new valve has a body machined from virgin 100% ultra-high purity PTFE for superior chemical resistance, and a one-piece, precision-machined diaphragm. It is available initially in three orifice sizes of 1/4, 1/2 and 1 inch, with port sizes ranging from 1/4 to 1-1/4 inches, and can be supplied with industry-standard Parflare or Nippon Pillar S300 end connections. The design of the valve is optimized to save critical clean room and sub-fab space; for example, the 1/4 inch version has a body size measuring just 1.5 x 1.25 x 2.91 inches (L x W x H). Both manual and pneumatically actuated configurations are available.

Advanced performance and reliability are key features of the valve. An angled and rounded flow path, plus an open and swept bowl shape around the diaphragm, minimize turbulence and eliminate sharp angles that can cause fluid shear - optimizing flow and protecting against entrapment and erosion in slurry, DI water, and chemical applications. These factors allow the Partek 20 Series valve to deliver superior flow rates, with Cv figures of 0.76, 3.9 and 13.5 for the 1/4, 1/2 and 1 inch variants respectively. A self-draining design further aids reliability when used with aggressive fluids in an open-loop system.

The design makes the valve particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarization or chemical-mechanical polishing) processes employed in semiconductor fabrication. The valve is also suitable for a wide range of other clean area processing and analytical applications, such as controlling the flow of acids, chemicals, and DI water.

The range of sizes and port connections available, plus the choice of pneumatic or manual variants, provides a versatile platform for building instrumentation and processing systems. In addition, Partek will integrate the valve into a custom manifold assembly (CASY) for clients, and will soon release a three-way configuration - further extending system building possibilities.

Parker Hannifin's Partek operation manufactures flow control products for use in fluid systems where corrosion protection is required or where media purity must be safeguarded. The wetted surfaces of all products are of chemically inert, corrosion-resistant PFA (perfluororalkoxy) or PTFE (polytetrafluoroethylene). Products include valves, manifolds, fittings, pressure regulators, flow meters, pumps and spray guns, for use in semiconductor processing, and other high purity applications including chemical, food and pharmaceutical processing, and biomedical and analytical instrumentation.

SOURCE: Parker Hannifin