Type 631A Absolute Heated 200 Degrees C Baratron Pressure Transducer
The Type 631A Absolute Heated 200°C Baratron pressure transducer provides condensation protection for high-temperature advanced semiconductor processes
N/Ae 631A Absolute Heated 200°C Baratron pressure transducer provides condensation protection for high-temperature advanced semiconductor processes using process chemistries such as low k dielectrics. The 200°C Baratrons prevent condensation of process gases with high sublimation temperatures to minimize contamination buildup on the sensor and particle generation.
N/Ae 631A integrates the sensor and electronics for improved accuracy (0.25% of reading), repeatability, and attenuation of noise. It also provides zero stability in pressure cycling applications—0.004% of full scale/°C (0.008% of full scale/°C[1T])—because of the high overpressure design (45 psia).
Other Baratrons in the type 631A Series offer thermostatically controlled 125° and 150° Baratron transducers. These transducers are optimized for a variety of chemistries processes at high temperatures, including titanium nitride, tantalum nitride, and tungsten nitride CVD materials. All transducers in the series are CE compliant.
<%=company%>, 6 Shattuck Rd., Andover MA 01810. Contact: Steve Hansen, 800-227-8766 or 978-975-2350; Fax: 978-975-0093.