In-House Vacuum Training Package

N/Ape VTS-113 complete vacuum training package uses the MKS industry-standard hands-on vacuum training system. The package provides all the materials necessary for presenting a hands-on vacuum and semiconductor process instrumentation training course. Included with the MKS Type VTS- I B table-top training system are manuals with 30 experiments that illustrate the operation of vacuum-based process equipment, instructor presentation transparencies, an instructor course guide, and materials for instructor training. In addition, the package provides optional MKS direct class presentation as well as training for internal instructors.

This package allows organizations to provide the fundamental vacuum and process instrument training required by many manufacturing sites. Materials are provided for a vacuum and process overview or a training course that covers vacuum gauging, including partial pressure or residual gas analyzers. It uses a Type 146 ClusterGauge Measurement and Control System in conjunction with a full complement of instruments (Type 1179 M.FC, 722 Baratron capacitance manometer, convection Pirani, and throttle valve). When interfaced with the user's PC using supplied software, the system provides setup, control, and display of various aspects of system operations, including flow control and stream and downstream PID pressure control.

<%=company%>, 6 Shattuck Rd., Andover MA 01810. Contact: Steve Hansen, 800-227-8766 or 978-975-2350; Fax: 978-975-0093.