Compact Vacuum Valves
It is ideally suited for the semiconductor industry or research. Primarily used for gauge or system isolation, we also recommend it as venting, bypass, or roughing valve.
In gauge isolation applications, the Cv valve's high conductance ensures more accurate readings and helps improve gauge response time. The valve can isolate the sensor from the chamber during venting to atmosphere. If a capacitance manometer is being used, the isolation valve will prevent overpressuring the diaphragm. Where the gauge is used to monitor pressure, and not required for process control, it can be isolated during the process to prevent process gases from contaminating the gauge.
The valve has many configurations to suit a system's particular needs. The angle and inline valves include pneumatic or manual actuation. The manual actuation is attained either through a rotary knob or toggle lever. The rotary knob option allows for conductance variability and includes a visual position indicator.
The angle valve is available in two sizes, ¾ in. and 1 in. The inline model is available in the 1 in. size. Both models are available with a variety of flange options, including CF and ISO-KF flanges.
For the body, a high grade, corrosion resistant, 304 stainless steel with non-magnetic properties is used to ensure more accurate gauge readings.
MKS Instruments, Vacuum Products Group, HPS Products, 5330 Sterling Dr., Boulder, CO 80301. Tel: 303-449-9861 or 800-345-1967. Fax: 303-442-6880.