Air Products to Double Nitrogen Trifluoride Production Capacity at Hometown, PA Facility

Air Products and Chemicals, Inc. (Lehigh Valley, PA) will use its newly developed Continuous NF₃ Reactor Technology to effectively double nitrogen trifluoride (NF₃) production at its Hometown, PA specialty gas facility to approximately 500,000 pounds-per-year. The project will enable Air Products to produce increased quantities of the gas, which the electronics industry uses in the chip manufacturing process. The expansion is expected to be finished by late 1999.

The development of the patented NF₃ technology was spearheaded by an Air Products team led by the company's chief fluorine technology scientist, Andrew J. Woytek. The new reactor design expands production volumes using the same process chemistry as before, while incorporating a new process control technology that facilitates the conversion of raw materials.

"We are committed to supplying semiconductor manufacturers with NF₃ and other specialty gases for their 'next generation' electronic products and process tools," said Gerald G. Ermentrout, vice president of Air Products' Electronics Division. "Our increased capacity will enable us to help our customers meet their future technology roadmaps."

In addition to NF₃, Air Products produces chlorine trifluoride, carbon tetrafluoride, and hexafluoroethane for use in etching and chamber cleaning.

Edited by Beth Brindle